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TSV

TSV PLATING ADDITIVES

MLI's research and development activities include the development of plating additive and processes for Cu filling of through-Si Vias (TSV). The primary goal is the reduction of the time for complete via fill to reduce the overall cost of consumables for 3-D packaging. Our accelerator, suppressor and levelers are being developed to control the plating rate at the field, upper corners, and side walls, leading to void-free bottom-up fill.


VERTICAL LINE TSV ADDITIVES

MLI is actively developing advanced TSV additives for high aspect ratio vias. MLI is developing additives that provide high rate bottom-up fill, reduced field plating, and excellent planarization.


TSV RESEARCH ACTIVITIES

MLI's research and development includes activities on future generation applications such as wet liner/seed processes as alternative to PVD barrier/seed processes for very high aspect ratio vias.



For more information on our TSV development activities, please contact us.






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