Proprietary additives that exhibit exceptionally wide process latitude for manufacturing and yield optimization. Key attributes include superior fill rate and uniformity across wide trench and via arrays, low post ECD and post CMP defectivity, excellent leveling (over plating), and minimum over burden. The materials achieve extremely smooth films surface roughness as dictated by customer integration schemes. These materials have the highest purity, tightest tolerances, are designed for superior productivity, and designed for advanced device extendibility. The most advanced products extend from 90nm through 22nm and beyond.